SPECTRAL ANALYSIS AND ITS APPLICATION IN MODERN MICROELECTRONICS TECHNOLOGIES
V Ostrozhinsky, N Gorbachuk - Sworld-Us Conference …, 2022 - proconference.org
V Ostrozhinsky, N Gorbachuk
Sworld-Us Conference proceedings, 2022•proconference.orgAnnotation. The paper briefly discusses the main modern methods of spectral analysis. The
application of mass spectral analysis to determine the elemental composition of Ge films on
GaAs substrates is shown. The concentration levels of Ga and As in these films were
determined.
application of mass spectral analysis to determine the elemental composition of Ge films on
GaAs substrates is shown. The concentration levels of Ga and As in these films were
determined.
Annotation. The paper briefly discusses the main modern methods of spectral analysis. The application of mass spectral analysis to determine the elemental composition of Ge films on GaAs substrates is shown. The concentration levels of Ga and As in these films were determined.
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